TY  - RPRT
TI  - The influence of the secondary electron induced asymmetry on the Electrical Asymmetry Effect in capacitively coupled plasmas
AU  - Ihor Korolov
AU  - Aranka Derzsi
AU  - Zoltan Donko
AU  - Julian Schulze
PY  - 2013
DO  - 10.1063/1.4817920
UR  - https://arxiv.org/abs/1305.5326
ID  - 1305.5326
ER  -