@misc{indiciaec4d167836e05,
  title = {Continuum and Kinetic Simulations of the Neutral Gas Flow in an Industrial Physical Vapor Deposition Reactor},
  author = {Kirsten Bobzin and Ralf Peter Brinkmann and Thomas Mussenbrock and Nazlim Bagcivan and Ricardo Henrique Brugnara and Marcel Schäfer and Jan Trieschmann},
  year = {2014},
  doi = {10.1016/j.surfcoat.2013.08.018},
  url = {https://arxiv.org/abs/1305.5793},
  note = {Source identifier: 1305.5793}
}