TY  - RPRT
TI  - Continuum and Kinetic Simulations of the Neutral Gas Flow in an Industrial Physical Vapor Deposition Reactor
AU  - Kirsten Bobzin
AU  - Ralf Peter Brinkmann
AU  - Thomas Mussenbrock
AU  - Nazlim Bagcivan
AU  - Ricardo Henrique Brugnara
AU  - Marcel Schäfer
AU  - Jan Trieschmann
PY  - 2014
DO  - 10.1016/j.surfcoat.2013.08.018
UR  - https://arxiv.org/abs/1305.5793
ID  - 1305.5793
ER  -