@misc{indiciae0cb4c544699b,
  title = {Time resolved measurement of film growth during reactive high power pulsed magnetron sputtering (HIPIMS) of titanium nitride},
  author = {Felix Mitschker and Marina Prenzel and Jan Benedikt and Christian Maszl and Achim von Keudell},
  year = {2013},
  doi = {10.1088/0022-3727/46/49/495201},
  url = {https://arxiv.org/abs/1305.7063},
  note = {Source identifier: 1305.7063}
}