TY  - RPRT
TI  - Time resolved measurement of film growth during reactive high power pulsed magnetron sputtering (HIPIMS) of titanium nitride
AU  - Felix Mitschker
AU  - Marina Prenzel
AU  - Jan Benedikt
AU  - Christian Maszl
AU  - Achim von Keudell
PY  - 2013
DO  - 10.1088/0022-3727/46/49/495201
UR  - https://arxiv.org/abs/1305.7063
ID  - 1305.7063
ER  -