@misc{indiciae87dbd1df4b41,
  title = {Deposited low temperature silicon GHz modulator},
  author = {Yoon Ho Daniel Lee and Michael O. Thompson and Michal Lipson},
  year = {2013},
  doi = {10.1364/oe.21.026688},
  url = {https://arxiv.org/abs/1306.0796},
  note = {Source identifier: 1306.0796}
}