TY  - RPRT
TI  - Deposited low temperature silicon GHz modulator
AU  - Yoon Ho Daniel Lee
AU  - Michael O. Thompson
AU  - Michal Lipson
PY  - 2013
DO  - 10.1364/oe.21.026688
UR  - https://arxiv.org/abs/1306.0796
ID  - 1306.0796
ER  -