@misc{indiciae0f15a726cfe6,
  title = {Particle beam experiments for the investigation of plasma-surface interactions: application to magnetron sputtering and polymer treatment},
  author = {Carles Corbella and Simon Grosse-Kreul and Oliver Kreiter and Teresa de los Arcos and Jan Benedikt and Achim von Keudell},
  year = {2013},
  url = {https://arxiv.org/abs/1306.1431},
  note = {Source identifier: 1306.1431}
}