TY  - RPRT
TI  - Particle beam experiments for the investigation of plasma-surface interactions: application to magnetron sputtering and polymer treatment
AU  - Carles Corbella
AU  - Simon Grosse-Kreul
AU  - Oliver Kreiter
AU  - Teresa de los Arcos
AU  - Jan Benedikt
AU  - Achim von Keudell
PY  - 2013
UR  - https://arxiv.org/abs/1306.1431
ID  - 1306.1431
ER  -