@misc{indiciae37f592445b06,
  title = {Sputtered TiN films for superconducting coplanar waveguide resonators},
  author = {Shinobu Ohya and Ben Chiaro and Anthony Megrant and Charles Neill and Rami Barends and Yu Chen and Julian Kelly and David Low and Josh Mutus and Peter O'Malley and Pedram Roushan and Daniel Sank and Amit Vainsencher and James Wenner and Theodore C. White and Yi Yin and B. D. Schultz and Chris J Palmstrøm and Benjamin A. Mazin and Andrew N. Cleland and John M. Martinis},
  year = {2013},
  url = {https://arxiv.org/abs/1306.2966},
  note = {Source identifier: 1306.2966}
}