@misc{indiciae0d6e4f9c370f,
  title = {Overcoming Si3N4 film stress limitations for High Quality factor ring resonators},
  author = {Kevin Luke and Avik Dutt and Carl B. Poitras and Michal Lipson},
  year = {2013},
  doi = {10.1364/oe.21.022829},
  url = {https://arxiv.org/abs/1306.2994},
  note = {Source identifier: 1306.2994}
}