TY  - RPRT
TI  - Overcoming Si3N4 film stress limitations for High Quality factor ring resonators
AU  - Kevin Luke
AU  - Avik Dutt
AU  - Carl B. Poitras
AU  - Michal Lipson
PY  - 2013
DO  - 10.1364/oe.21.022829
UR  - https://arxiv.org/abs/1306.2994
ID  - 1306.2994
ER  -