@misc{indiciaee2d6aa6cde21,
  title = {Laser-Doping of Crystalline Silicon Substrates using Doped Silicon Nanoparticles},
  author = {Martin Meseth and Kais Lamine and Martin Dehnen and Sven Kayser and Wolfgang Brock and Dennis Behrenberg and Hans Orthner and Anna Elsukova and Nils Hartmann and Hartmut Wiggers and Tim Hülser and Hermann Nienhaus and Niels Benson and Roland Schmechel},
  year = {2013},
  doi = {10.1016/j.tsf.2013.09.056},
  url = {https://arxiv.org/abs/1307.0795},
  note = {Source identifier: 1307.0795}
}