@misc{indiciae806470a509dd,
  title = {Micromanipulation transfer of membrane resonators for circuit optomechanics},
  author = {Maria Berdova and Sung Un Cho and Juha-Matti Pirkkalainen and Jaakko Sulkko and Xuefeng Song and Pertti J. Hakonen and Mika A. Sillanpaa},
  year = {2013},
  doi = {10.1088/0960-1317/23/12/125024},
  url = {https://arxiv.org/abs/1307.1619},
  note = {Source identifier: 1307.1619}
}