@misc{indiciae4e111da02b28,
  title = {Improved surface quality of anisotropically etched silicon \{111\} planes for mm-scale integrated optics},
  author = {J. P. Cotter and I. Zeimpekis and M Kraft and E A Hinds},
  year = {2013},
  doi = {10.1088/0960-1317/23/11/117006},
  url = {https://arxiv.org/abs/1307.3980},
  note = {Source identifier: 1307.3980}
}