TY  - RPRT
TI  - Improved surface quality of anisotropically etched silicon {111} planes for mm-scale integrated optics
AU  - J. P. Cotter
AU  - I. Zeimpekis
AU  - M Kraft
AU  - E A Hinds
PY  - 2013
DO  - 10.1088/0960-1317/23/11/117006
UR  - https://arxiv.org/abs/1307.3980
ID  - 1307.3980
ER  -