@misc{indiciaeb58ce67dabaf, title = {Evidence for hydrogen two-level systems in atomic layer deposition oxides}, author = {M. S. Khalil and M. J. A. Stoutimore and S. Gladchenko and A. M. Holder and C. B. Musgrave and A. C. Kozen and G. Rubloff and Y. Q. Liu and R. G. Gordon and J. H. Yum and S. K. Banerjee and C. J. Lobb and K. D. Osborn}, year = {2013}, doi = {10.1063/1.4826253}, url = {https://arxiv.org/abs/1307.7664}, note = {Source identifier: 1307.7664} }