@misc{indiciae10402a84a839,
  title = {Chemical mechanical polishing of thin film diamond},
  author = {Evan L. H. Thomas and Geoffrey W. Nelson and Soumen Mandal and John S. Foord and Oliver A. Williams},
  year = {2013},
  doi = {10.1016/j.carbon.2013.11.023},
  url = {https://arxiv.org/abs/1308.1239},
  note = {Source identifier: 1308.1239}
}