@misc{indiciae5111db548e6d,
  title = {ALD grown zinc oxide with controllable electrical properties},
  author = {E. Guziewicz and M. Godlewski and L. Wachnicki and T. A. Krajewski and G. Luka and S. Gieraltowska and R. Jakiela and A. Stonert and W. Lisowski and M. Krawczyk and J. W. Sobczak and A. Jablonski},
  year = {2013},
  doi = {10.1088/0268-1242/27/7/074011},
  url = {https://arxiv.org/abs/1308.2064},
  note = {Source identifier: 1308.2064}
}