@misc{indiciae1d66fed50a38,
  title = {Vacuum nanogap formation in multilayer structures by an adhesion-controlled process},
  author = {Z. Taliashvili and A. Tavkhelidze and L. Jangidze and Y. Blagidze},
  year = {2013},
  doi = {10.1016/j.tsf.2013.06.089},
  url = {https://arxiv.org/abs/1308.6455},
  note = {Source identifier: 1308.6455}
}