TY  - RPRT
TI  - Vacuum nanogap formation in multilayer structures by an adhesion-controlled process
AU  - Z. Taliashvili
AU  - A. Tavkhelidze
AU  - L. Jangidze
AU  - Y. Blagidze
PY  - 2013
DO  - 10.1016/j.tsf.2013.06.089
UR  - https://arxiv.org/abs/1308.6455
ID  - 1308.6455
ER  -