@misc{indiciae6d01a91efc4b, title = {Bottom-up superconducting and Josephson junction devices inside a group-IV semiconductor}, author = {Yun-Pil Shim and Charles Tahan}, year = {2014}, doi = {10.1038/ncomms5225}, url = {https://arxiv.org/abs/1309.0015}, note = {Source identifier: 1309.0015} }