@misc{indiciae383cbda80911,
  title = {Ultra-thin film and interface analysis of high-k dielectric materials employing Time-Of-Flight Medium Energy Ion Scattering (TOF-MEIS)},
  author = {Daniel Primetzhofer and Eugenio Dentoni Litta and Anders Hallén and Margareta K. Linnarsson and Göran Possnert},
  year = {2013},
  doi = {10.1016/j.nimb.2014.02.063},
  url = {https://arxiv.org/abs/1309.0611},
  note = {Source identifier: 1309.0611}
}