TY  - RPRT
TI  - Ultra-thin film and interface analysis of high-k dielectric materials employing Time-Of-Flight Medium Energy Ion Scattering (TOF-MEIS)
AU  - Daniel Primetzhofer
AU  - Eugenio Dentoni Litta
AU  - Anders Hallén
AU  - Margareta K. Linnarsson
AU  - Göran Possnert
PY  - 2013
DO  - 10.1016/j.nimb.2014.02.063
UR  - https://arxiv.org/abs/1309.0611
ID  - 1309.0611
ER  -