TY  - RPRT
TI  - Electrophysical characteristics of near-surface layers in p-Si crystals with sputtered Al films and subjected to elastic deformation
AU  - Bohdan Pavlyk
AU  - Markijan Kushlyk
AU  - Roman Didyk
AU  - Joseph Shykorjak
AU  - Dmytro Slobodzyan
AU  - Bohdan Kulyk
PY  - 2013
UR  - https://arxiv.org/abs/1309.0983
ID  - 1309.0983
ER  -