@misc{indiciae733b73fdfb00,
  title = {Heteroepitaxy of Group IV-VI Nitrides by Atomic Layer Deposition},
  author = {Jeffrey A. Klug and Nicholas G. Becker and Nickolas R. Groll and Chaoyue Cao and Matthew S. Weimer and Michael J. Pellin and John F. Zasadzinski and Thomas Proslier},
  year = {2013},
  doi = {10.1063/1.4831977},
  url = {https://arxiv.org/abs/1309.1789},
  note = {Source identifier: 1309.1789}
}