@misc{indiciae0726b04884ac,
  title = {Freeform high-speed large-amplitude deformable Piezo Mirrors},
  author = {Matthias C Wapler and Jens Brunne and Ulrike Wallrabe},
  year = {2013},
  doi = {10.1109/omn.2013.6659107},
  url = {https://arxiv.org/abs/1309.3156},
  note = {Source identifier: 1309.3156}
}