TY  - RPRT
TI  - Freeform high-speed large-amplitude deformable Piezo Mirrors
AU  - Matthias C Wapler
AU  - Jens Brunne
AU  - Ulrike Wallrabe
PY  - 2013
DO  - 10.1109/omn.2013.6659107
UR  - https://arxiv.org/abs/1309.3156
ID  - 1309.3156
ER  -