TY - RPRT TI - Piezo films with adjustable anisotropic strain for bending actuators with tunable bending profiles AU - Matthias C Wapler AU - Moritz Stürmer AU - Jens Brunne AU - Ulrike Wallrabe PY - 2014 DO - 10.1088/0964-1726/23/5/055006 UR - https://arxiv.org/abs/1309.3171 ID - 1309.3171 ER -