TY - RPRT TI - Design and Testing of Kinetic Inductance Detectors Made of Titanium Nitride AU - P. Diener AU - H. G. Leduc AU - S. J. C. Yates AU - Y. J. Y. Lankwarden AU - J. J. A. Baselmans PY - 2013 DO - 10.1007/s10909-012-0484-z UR - https://arxiv.org/abs/1309.4317 ID - 1309.4317 ER -