@misc{indiciae528d9410547d,
  title = {Probing the Nucleation of Al2O3 in Atomic Layer Deposition on Aluminum for Ultrathin Tunneling Barriers in Josephson Junctions},
  author = {Alan J. Elliot and Gary Malek and Logan Wille and Rongtao Lu and Siyuan Han and Judy Z. Wu and John Talvacchio and Rupert M. Lewis},
  year = {2014},
  doi = {10.1109/tasc.2013.2247452},
  url = {https://arxiv.org/abs/1309.4404},
  note = {Source identifier: 1309.4404}
}