@misc{indiciae32f1bd700f13,
  title = {Fabrication of Nb/Al2O3/Nb Josephson Junctions using in situ Magnetron Sputtering and Atomic Layer Deposition},
  author = {Rongtao Lu and Alan J. Elliot and Logan Wille and Bo Mao and Siyuan Han and Judy Z. Wu and John Talvacchio and Heidi M. Schulze and Rupert M. Lewis and Daniel J. Ewing and H. F. Yu and G. M. Xue and S. P. Zhao},
  year = {2013},
  doi = {10.1109/tasc.2012.2236591},
  url = {https://arxiv.org/abs/1309.4410},
  note = {Source identifier: 1309.4410}
}