@misc{indiciaed44dcaa56cd2,
  title = {Deep Sub-Micron Stud-Via Technology for Superconductor VLSI Circuits},
  author = {Sergey K. Tolpygo and V. Bolkhovsky and T. Weir and L. Johnson and W. D. Oliver and M. A. Gouker},
  year = {2013},
  doi = {10.1088/0953-2048/27/2/025016},
  url = {https://arxiv.org/abs/1309.7505},
  note = {Source identifier: 1309.7505}
}