@misc{indiciaeddaf85a7f1b6,
  title = {A new dimension for piezo actuators: Free-form out-of-plane displacement of single piezo layers},
  author = {Matthias C Wapler and Jens Brunne and Ulrike Wallrabe},
  year = {2013},
  doi = {10.1088/0964-1726/22/10/102001},
  url = {https://arxiv.org/abs/1310.0342},
  note = {Source identifier: 1310.0342}
}