TY  - RPRT
TI  - A new dimension for piezo actuators: Free-form out-of-plane displacement of single piezo layers
AU  - Matthias C Wapler
AU  - Jens Brunne
AU  - Ulrike Wallrabe
PY  - 2013
DO  - 10.1088/0964-1726/22/10/102001
UR  - https://arxiv.org/abs/1310.0342
ID  - 1310.0342
ER  -