@misc{indiciaeaddb5fa01243, title = {Derivation and Equilibrium Analysis of a Regularized Model for Electrostatic MEMS}, author = {A. E. Lindsay and J. Lega and K. B. Glasner}, year = {2013}, url = {https://arxiv.org/abs/1310.0422}, note = {Source identifier: 1310.0422} }