TY  - RPRT
TI  - Derivation and Equilibrium Analysis of a Regularized Model for Electrostatic MEMS
AU  - A. E. Lindsay
AU  - J. Lega
AU  - K. B. Glasner
PY  - 2013
UR  - https://arxiv.org/abs/1310.0422
ID  - 1310.0422
ER  -