@misc{indiciae4dd85a6e6a3e,
  title = {Numerical analysis of the morphological and phase changes in the TiN/Al\_\{2\}O\_\{3\} coating under high current electron beam modification},
  author = {A. D. Pogrebnjak and V. N. Borisyuk and A. A. Bagdasaryan},
  year = {2013},
  doi = {10.5488/cmp.16.33803},
  url = {https://arxiv.org/abs/1310.1235},
  note = {Source identifier: 1310.1235}
}