TY  - RPRT
TI  - In-situ growth optimization in focused electron-beam induced deposition
AU  - Paul M. Weirich
AU  - Marcel Winhold
AU  - Christian H. Schwalb
AU  - Michael Huth
PY  - 2013
UR  - https://arxiv.org/abs/1310.3749
ID  - 1310.3749
ER  -