@misc{indiciaebb19bb7f3041,
  title = {Comparison of H2 and He carbon cleaning mechanisms in extreme ultraviolet induced and surface wave discharge plasmas},
  author = {A Dolgov and D Lopaev and T Rachimova and A Kovalev and A Vasilyeva and C J Lee and V M Krivtsun and O Yakushev and F Bijkerk},
  year = {2013},
  doi = {10.1088/0022-3727/47/6/065205},
  url = {https://arxiv.org/abs/1310.4057},
  note = {Source identifier: 1310.4057}
}