@misc{indiciaec8d74bda2f67,
  title = {Effects of ozone post deposition treatment on interfacial and electrical characteristics of atomic-layer-deposited Al2O3 and HfO2 films on GaSb substrates},
  author = {Lianfeng Zhao and Zhen Tan and Jing Wang and Jun Xu},
  year = {2013},
  doi = {10.1016/j.apsusc.2013.11.054},
  url = {https://arxiv.org/abs/1310.6457},
  note = {Source identifier: 1310.6457}
}