@misc{indiciae70e8326a3dae, title = {Dissipation in ultrahigh quality factor SiN membrane resonators}, author = {S. Chakram and Y. S. Patil and L. Chang and M. Vengalattore}, year = {2013}, doi = {10.1103/physrevlett.112.127201}, url = {https://arxiv.org/abs/1311.1234}, note = {Source identifier: 1311.1234} }