TY - RPRT TI - Dissipation in ultrahigh quality factor SiN membrane resonators AU - S. Chakram AU - Y. S. Patil AU - L. Chang AU - M. Vengalattore PY - 2013 DO - 10.1103/physrevlett.112.127201 UR - https://arxiv.org/abs/1311.1234 ID - 1311.1234 ER -