@misc{indiciae364a13885d59,
  title = {Helium Ion Microscopy},
  author = {Gregor Hlawacek and Vasilisa Veligura and Raoul van Gastel and Bene Poelsema},
  year = {2014},
  doi = {10.1116/1.4863676},
  url = {https://arxiv.org/abs/1311.1711},
  note = {Source identifier: 1311.1711}
}