@misc{indiciae7ba77739b4f8,
  title = {A new investigation of oxygen flow influence on ITO thin films by magnetron sputtering},
  author = {Aqing Chen and Kaigui Zhu and Huicai Zhong and Qingyi Sha and Guanglu Ge},
  year = {2013},
  url = {https://arxiv.org/abs/1311.5943},
  note = {Source identifier: 1311.5943}
}