TY  - RPRT
TI  - A new investigation of oxygen flow influence on ITO thin films by magnetron sputtering
AU  - Aqing Chen
AU  - Kaigui Zhu
AU  - Huicai Zhong
AU  - Qingyi Sha
AU  - Guanglu Ge
PY  - 2013
UR  - https://arxiv.org/abs/1311.5943
ID  - 1311.5943
ER  -