@misc{indiciaed54db768ba7d,
  title = {Si\$\_3\$N\$\_4\$ optomechanical crystals in the resolved-sideband regime},
  author = {Marcelo Davanco and Serkan Ates and Yuxiang Liu and Kartik Srinivasan},
  year = {2013},
  doi = {10.1063/1.4858975},
  url = {https://arxiv.org/abs/1311.6325},
  note = {Source identifier: 1311.6325}
}