TY - RPRT TI - Si$_3$N$_4$ optomechanical crystals in the resolved-sideband regime AU - Marcelo Davanco AU - Serkan Ates AU - Yuxiang Liu AU - Kartik Srinivasan PY - 2013 DO - 10.1063/1.4858975 UR - https://arxiv.org/abs/1311.6325 ID - 1311.6325 ER -