@misc{indiciaebeeaeab2b1a4,
  title = {Large area buried nanopatterning by broad ion implantation without any mask or direct writing},
  author = {Prasanta Karmakar and Biswarup Satpati},
  year = {2013},
  url = {https://arxiv.org/abs/1311.6646},
  note = {Source identifier: 1311.6646}
}