@misc{indiciae1a0594388cd3,
  title = {Study of depth profile of hydrogen in hydrogenated diamond like carbon thin film using ion beam analysis techniques},
  author = {J Datta and H S Biswas and P Rao and G L N Reddy and S Kumar and N R Ray and D P Chowdhury and A V R Reddy},
  year = {2013},
  doi = {10.1016/j.nimb.2014.02.127},
  url = {https://arxiv.org/abs/1311.7463},
  note = {Source identifier: 1311.7463}
}